The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
May. 03, 2002
Peter Dirksen, Leuven, BE;
Casparus Anthonius Henricus Juffermans, Leuven, BE;
Augustus Josephus Elizabeth Maria Janssen, Eindhoven, NL;
Peter Dirksen, Leuven, BE;
Casparus Anthonius Henricus Juffermans, Leuven, BE;
Augustus Josephus Elizabeth Maria Janssen, Eindhoven, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
For determining aberrations of an optical imaging system (PL), a test object () comprising at least one delta test feature () is imaged either on an aerial scanning detector () or in a resist layer (), which layer is scanned by a scanning device, for example a SEM. A new analytical method is used to retrieve from the data stream generated by the aerial detector or the scanning device different Zernike coefficients (Zn).