The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2008
Filed:
Jul. 28, 2004
Joeri Lof, Eindhoven, NL;
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Gerardus Johannes Joseph Keijsers, Venlo, NL;
Robertus Victorius Maria Scheepens, 's-Hertogenbosch, NL;
Joeri Lof, Eindhoven, NL;
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Gerardus Johannes Joseph Keijsers, Venlo, NL;
Robertus Victorius Maria Scheepens, 's-Hertogenbosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a method of measuring front to backside alignment error according to one embodiment, a transparent substrate has a plurality of marks on both the front and backside. The relative location of the marks on the front and backside of the substrate is determined to calculate the front to backside alignment error for the whole substrate. In a further embodiment, the substrate is rotated by 180° within the plane of the substrate and the front relative location of the marks is again determined.