The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2008
Filed:
Jul. 01, 2004
Bhushan L. Sopori, Denver, CO (US);
Artak Hambarian, Yerevan, AM;
Bhushan L. Sopori, Denver, CO (US);
Artak Hambarian, Yerevan, AM;
Midwest Research Institute, Kansas City, MO (US);
Abstract
Described herein is an optical probe () for use in characterizing surface defects in wafers, such as semiconductor wafers. The optical probe () detects laser light reflected from the surface () of the wafer () within various ranges of angles. Characteristics of defects in the surface () of the wafer () are determined based on the amount of reflected laser light detected in each of the ranges of angles. Additionally, a wafer characterization system () is described that includes the described optical probe ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile