The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2008

Filed:

Jun. 08, 2005
Applicant:

Michael A. Forman, San Francisco, CA (US);

Inventor:

Michael A. Forman, San Francisco, CA (US);

Assignee:

Sandia Corporation, Livermore, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01P 1/203 (2006.01); H01P 1/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.


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Forman, Michael. (2008). Micromachined microwave signal control device and method for making same (U.S. Patent No. 7420442). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7420442

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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