Wafer stage storage structure speed testing

Abstract

A system for testing integrated circuit storage structures on a semiconductor wafer. A test IC manufactured on a semiconductor wafer includes a test storage structure such as a random access memory structure, for example, and an access controller including one or more clock sources. In various embodiments, the clock sources may include a ring oscillator and a pulse width generator. These clock sources may be programmable to provide a clock signal having a variety of frequencies for accessing the storage structure. In one embodiment, the frequencies provided by the access controller may be higher than a frequency that can be supplied to the wafer from ATE. In another embodiment, the pulse width generator may be programmable to provide a pulse train having a variety of duty cycles.