The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
May. 27, 2003
Applicants:
Raimund Mellies, Dieburg, DE;
Marc Boerner, Darmstadt, DE;
Lucia Arnold, Muenster, DE;
Andrea Barko, Stockstadt, DE;
Rudolf Rhein, Heppenheim, DE;
Inventors:
Raimund Mellies, Dieburg, DE;
Marc Boerner, Darmstadt, DE;
Lucia Arnold, Muenster, DE;
Andrea Barko, Stockstadt, DE;
Rudolf Rhein, Heppenheim, DE;
Assignee:
BASF SE, Ludwigshafen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); C25F 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a composition for the removal of so-called 'sidewall residues' from metal surfaces, in particular from aluminium or aluminium-containing surfaces, in particular from aluminium or aluminium-containing surfaces, during the production of semiconductor elements.