The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Jun. 12, 2003
Antonius Maria Petrus Johannes Hendriks, Nijmegen, NL;
Josephus Franciscus Antonius Maria Guelen, Nijmegen, NL;
Guido Jozef Maria Dormans, Nijmegen, NL;
Antonius Maria Petrus Johannes Hendriks, Nijmegen, NL;
Josephus Franciscus Antonius Maria Guelen, Nijmegen, NL;
Guido Jozef Maria Dormans, Nijmegen, NL;
NXP B.V., Eindhoven, NL;
Abstract
A method for manufacturing on a substrate () a semiconductor device with improved floating-gate to control-gate coupling ratio is described. The method comprises the steps of first forming an isolation zone () in the substrate (), thereafter forming the floating gate () on the substrate (), thereafter extending the floating gate () using polysilicon spacers (), and thereafter forming the control gate () over the floating gate () and the polysilicon spacers (). Such a semiconductor device may be used in flash memory cells or EEPROMs.