The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Dec. 23, 2004
Applicants:
Hiroto Matsuda, Ogaki, JP;
Kazuhiro Nobori, Handa, JP;
Yasuyoshi Imai, Nagoya, JP;
Tetsuya Kawajiri, Handa, JP;
Inventors:
Hiroto Matsuda, Ogaki, JP;
Kazuhiro Nobori, Handa, JP;
Yasuyoshi Imai, Nagoya, JP;
Tetsuya Kawajiri, Handa, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×10Ω·cm at room temperature and a volume resistivity equal to or greater than about 1×10Ω·cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.