The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Aug. 05, 2003
Manabu Nishimura, Hyogo, JP;
Takahiko Kuroda, Hyogo, JP;
Shuya Abe, Hyogo, JP;
Makoto Tanaka, Kanagawa, JP;
Mitsugu Irinoda, Miyagi, JP;
Kenichiroh Hashimoto, Kanagawa, JP;
Manabu Nishimura, Hyogo, JP;
Takahiko Kuroda, Hyogo, JP;
Shuya Abe, Hyogo, JP;
Makoto Tanaka, Kanagawa, JP;
Mitsugu Irinoda, Miyagi, JP;
Kenichiroh Hashimoto, Kanagawa, JP;
Ricoh Company, Ltd., Tokyo, JP;
Abstract
An electrostatic actuator has high-reliability and less variation in characteristics. An electrode () is formed on a substrate (), and a plurality of partition parts () are formed on the electrode. A vibration plate () is formed on the partition parts (), and is deformable by an electrostatic force generated by a voltage applied to the electrode () so that an air gap () is formed between the partition parts () by etching a part of a sacrifice layer () formed between the electrode () and the vibration plate (). The partition parts () are formed of remaining parts of the sacrifice layer () after the etching.