The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Feb. 09, 2004
Tadahiro Ohmi, Sendai-shi, Miyagi, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Masafumi Kitano, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Masafumi Kitano, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Other;
Fujikin Incorporated, Osaka-shi, Osaka, JP;
Abstract
A diaphragm valveis provided with a bodyhaving a flow-in passagea flow-out passageand a valve seatformed between the passages; a diaphragminstalled in the bodyand permitted to rest on and move away from the valve seatand a driving meansinstalled on the bodyto allow the diaphragmto rest on and move away from the valve seatwherein synthetic resin filmsof predetermined thickness are coated on fluid-contacting partsof the afore-mentioned bodyand diaphragmA diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.