The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Dec. 22, 2004
Applicants:
Shinji Sugatani, Kawasaki, JP;
Koichi Hashimoto, Kawasaki, JP;
Yoshihiro Takao, Kawasaki, JP;
Inventors:
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
Abstract
The semiconductor device comprises a semiconductor substratewith a trenchand a trenchformed in; a device isolation filmburied in the trenchand including a liner film including a silicon nitride filmand an insulating filmof a silicon oxide-based insulating material; a device isolation filmburied in the bottom of the trench; and a capacitor formed on a side wall of an upper part of the second trenchand including an impurity diffused regionas a first electrode, a capacitor dielectric filmof a silicon oxide-based insulating film and a second electrode