The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Sep. 07, 2006
Stephan Kudelka, Dresden, DE;
Peter Moll, Dresden, DE;
Stefan Jakschik, Kessel-Lo, BE;
Odo Wunnicke, Dresden, DE;
Stephan Kudelka, Dresden, DE;
Peter Moll, Dresden, DE;
Stefan Jakschik, Kessel-Lo, BE;
Odo Wunnicke, Dresden, DE;
Qimonda AG, Munich, DE;
Abstract
A method produces stacked capacitors for dynamic memory cells, in which a number of trenches () are formed in the masking layer (), each trench () being arranged above a respective contact plug () and extending from the top () of the masking layer () to the contact plugs (). A conductive layer () covers the side walls () of the trenches () and the contact plugs () in order to form a first electrode () of a stacked capacitor (). In an upper region (), which is remote from the contact stack (), the conductive layer () is replaced by an insulating layer, so that it is not possible for a short circuit to arise in the event of any adhesion between adjacent electrodes.