The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
May. 11, 2005
Jyh-shin Chen, Hsinchu, TW;
Der-chi Shye, Bade, TW;
Meng-wei Kuo, Kaohsiung, TW;
Ming-hua Shiao, Hsin-Chu, TW;
Jiann-shium Kao, Hsin-Chu, TW;
Huang-chung Cheng, Hsinchu, TW;
Bi-shiou Chiou, Hsinchu, TW;
Jyh-Shin Chen, Hsinchu, TW;
Der-Chi Shye, Bade, TW;
Meng-Wei Kuo, Kaohsiung, TW;
Ming-Hua Shiao, Hsin-Chu, TW;
Jiann-Shium Kao, Hsin-Chu, TW;
Huang-Chung Cheng, Hsinchu, TW;
Bi-Shiou Chiou, Hsinchu, TW;
Abstract
A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.