The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Dec. 16, 2004
Hartmut Bauch, Weilrod, DE;
Lars Bewig, Bad Gandersheim, DE;
Lutz Klippe, Weisbaden, DE;
Thomas Küpper, Bad Gandersheim, DE;
Hartmut Bauch, Weilrod, DE;
Lars Bewig, Bad Gandersheim, DE;
Lutz Klippe, Weisbaden, DE;
Thomas Küpper, Bad Gandersheim, DE;
Schott AG, Mainz, DE;
Abstract
A method for producing optical functional coatings comprising niobium, tantalum, titanium or aluminum by supplying a precursor gas of low vapor pressure in a CVD coating system. A precursor selected from the group consisting of Nb, Ta, Ti, and Al compounds having a vapor pressure is maintained within a first supply container at a first temperature Tand a first pressure p. Precursor vapor of the precursor is supplied from the first supply container to an intermediate storage device through a first gas line which fluidly communicates the first supply container and the intermediate storage device. A carrier gas or reaction gas is supplied to the first gas line such that a mixture of the precursor with the carrier gas or the reaction gas is provided. The mixture is maintained in the intermediate storage device at a constant second pressure plower than the first pressure pand at a second temperature Tlower than the first temperature T, and the mixture is supplied from the intermediate storage device through a second gas line.