The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Apr. 27, 2005
Peter W. Gaudet, Hyde Park, MA (US);
Robert J. Lepofsky, Wellesley, MA (US);
Alan L. Weeks, South Easton, MA (US);
Gerald J. Fortier, Plainville, MA (US);
Stephen R. Matté, Norfolk, MA (US);
Martin Stein, Bedford, MA (US);
Steven C. Rosner, Milton, MA (US);
Peter W. Gaudet, Hyde Park, MA (US);
Robert J. Lepofsky, Wellesley, MA (US);
Alan L. Weeks, South Easton, MA (US);
Gerald J. Fortier, Plainville, MA (US);
Stephen R. Matté, Norfolk, MA (US);
Martin Stein, Bedford, MA (US);
Steven C. Rosner, Milton, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.