The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Feb. 25, 2005
Todd J. Brill, Round Rock, TX (US);
Michael Teferra, Los Gatos, CA (US);
Amitabh Puri, San Jose, CA (US);
Daniel R. Jessop, Eagle Mountain, UT (US);
Glade L. Warner, Sandy, UT (US);
David C. Duffin, Sandy, UT (US);
Todd J. Brill, Round Rock, TX (US);
Michael Teferra, Los Gatos, CA (US);
Amitabh Puri, San Jose, CA (US);
Daniel R. Jessop, Eagle Mountain, UT (US);
Glade L. Warner, Sandy, UT (US);
David C. Duffin, Sandy, UT (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.