The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Feb. 27, 2003
Hiroshi Kurosawa, Chiba, JP;
Hiroshi Kurosawa, Chiba, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An alignment apparatus which drives to a target position a stage capable of moving at least in a two-dimensional direction. A first measurement device and a second measurement device have a function of measuring positions of the stage in one direction from different positions, a switching device performs a switching operation for switching the first measurement device to the second measurement device, and a controller sets an initial value for the second position measurement device, which is used after the switching operation, based on the position of the stage finally measured by the first position measurement device before the switching operation.