The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Nov. 24, 2004
LI Xin-shan, Nagano-ken, JP;
Hironobu Kazama, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Koji Sumi, Nagano-ken, JP;
Maki Ito, Nagano-ken, JP;
Toshiaki Yokouchi, Nagano-ken, JP;
Li Xin-Shan, Nagano-ken, JP;
Hironobu Kazama, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Koji Sumi, Nagano-ken, JP;
Maki Ito, Nagano-ken, JP;
Toshiaki Yokouchi, Nagano-ken, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.