The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Oct. 15, 2004
Stephan Dertinger, Munich, DE;
Michaela Fritz, Munich, DE;
Karin Fuchs, Bach, DE;
Thomas Haneder, Dachau, DE;
Volker Lehmann, Munich, DE;
Alfred Martin, Munich, DE;
Reinhard Marz, Munich, DE;
Stephan Dertinger, Munich, DE;
Michaela Fritz, Munich, DE;
Karin Fuchs, Bach, DE;
Thomas Haneder, Dachau, DE;
Volker Lehmann, Munich, DE;
Alfred Martin, Munich, DE;
Reinhard Marz, Munich, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
Device having a flat macroporous support material made of silicon and having surfaces, a plurality of pores each having a diameter in a range of from 500 nm to 100 μm distributed over at least one surface region of the support material and extending from one surface through to the opposite surface of the support material, at least one region having one or more pores with SiO2 pore walls, and a frame of walls with a silicon core surrounding the at least one region and arranged essentially parallel to longitudinal axes of the pores and open towards the surfaces, wherein the silicon core merges into silicon dioxide over a cross section towards an outer side of the walls forming the frame.