The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Mar. 20, 2003
Hiroshi Ogi, Kyoto, JP;
Hiroshi Ogi, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
An inspection systemincludes an image pickup apparatusfor picking up an image of a defect, an inspection and classification apparatusfor performing inspection and automatic classification of defects, and a host computer. The host computerperforms learning for automatic classification at the inspection and classification apparatus. For creation of training data to be used for learning, defect images are arranged on a display of the host computeron the basis of sizes of defects or imaging positions for picking up images of defects. A visual sign is provided to the defect image indicating a category assigned thereto. Further, in response to an operation by an operator, a statistical value of feature values of defect images included in a category, data obtained in inspection, images after being subjected to image processing, similar images or dissimilar images similar to or dissimilar to a defect image targeted for classification, an area directed to calculation of feature values in a defect image targeted for classification, and the like, are suitably displayed.