The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Feb. 09, 2006
Applicants:
Roman Windpassinger, Goettingen, DE;
Frank Simon, Goettingen, DE;
Inventors:
Roman Windpassinger, Goettingen, DE;
Frank Simon, Goettingen, DE;
Assignee:
Coherent, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/14 (2006.01); G02B 27/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.