The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 2008

Filed:

Feb. 23, 2006
Applicants:

Takeshi Nakajima, Kanagawa, JP;

Manabu Higuchi, Kanagawa, JP;

Takeshi Wakita, Kanagawa, JP;

Inventors:

Takeshi Nakajima, Kanagawa, JP;

Manabu Higuchi, Kanagawa, JP;

Takeshi Wakita, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with its optical axis inclined by a cross angle θto a normal line that is perpendicular to the film surface, and the cross angle θis set in a range from 30° to 50°. The optical axis of the light receiver is also turned about the normal line by a rotational angle θto a transport direction (S) of the film. The rotational angle θis set in a range from minus 60° to plus 60°, on the assumption that the transport direction is zero degree.


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