The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Nov. 21, 2006
Hisanori Matsumoto, Kokubunji, JP;
Kengo Asai, Hachioji, JP;
Atsushi Isobe, Kodaira, JP;
Mitsutaka Hikita, Hachioji, JP;
Hisanori Matsumoto, Kokubunji, JP;
Kengo Asai, Hachioji, JP;
Atsushi Isobe, Kodaira, JP;
Mitsutaka Hikita, Hachioji, JP;
Hitachi Media Electronics Co., Ltd., Iwate, JP;
Abstract
The present invention provides a film bulk acoustic wave resonator (FBAR) filter that can keep the Q factor high. The FBAR filter comprises a first FBAR with a first resonant frequency and a second FBAR with a second resonant frequency, formed on a same substrate. The FBAR filter has such a structure that a first underlayer is formed between the substrate and a first bottom electrode layer and a second underlayer is formed between the substrate and a second bottom electrode layer, the first underlayer thickness being different from the second underlayer thickness.