The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7407733 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 05, 2008

Filed:

May. 25, 2005
Applicants:

Hiroshi Koyama, Himeji, JP;

Takeshi Asada, Himeji, JP;

Inventors:

Hiroshi Koyama, Himeji, JP;

Takeshi Asada, Himeji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); C08F 24/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A polymeric compound of the invention includes at least one monomer unit represented by the following formula (I); wherein Ris a hydrogen atom, a halogen atom, an alkyl group of 1 to 6 carbon atoms or an haloalkyl group of 1 to 6 carbon atoms; each of Rand Ris identical to or different from a hydrogen atom or a hydrocarbon group, provided that at least one of Rand Ris a hydrocarbon group; Rand Rmay be bonded together to form a ring with an adjacent carbon atom; and each of R, R, R, R, R, Rand Ris identical to or different from a hydrogen atom or a hydrocarbon group. This polymeric compound has not only high substrate adhesion and high etching resistance but also high solubility for a resist solvent.


Find Patent Forward Citations

Koyama, Hiroshi. (2008). [object object] (U.S. Patent No. 7407733). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7407733

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