The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Oct. 21, 2004
Kazushige Umetsu, Chino, JP;
Kazuto Yoshimura, Suwa, JP;
Tsukasa Funasaka, Shiojirishi, JP;
Fumitaka Kitamura, Suwa, JP;
Kazushige Umetsu, Chino, JP;
Kazuto Yoshimura, Suwa, JP;
Tsukasa Funasaka, Shiojirishi, JP;
Fumitaka Kitamura, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.