Mems switch

Abstract

It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio. An MEMS switch includes a substrate, a conductive beamformed on a surface of the substrate, and three-layer structure beams Band Bformed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer, a second conductive layerand a dielectric layersandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam; at least one of the conductive beamand the three-layer structure beams is displaced on a plane parallel to the substratedue to an electrostatic force so that the conductive beamand the first conductive layercan come into contact with each other; and a conductive path is formed between the conductive beamand the second conductive layerwhen the conductive beamand the first conductive layer are in contact with each other.