The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Nov. 19, 2003
Mark L. Diorio, Cupertino, CA (US);
Mark L. DiOrio, Cupertino, CA (US);
Novellus Development Company, LLC, San Jose, CA (US);
Abstract
A probing system for electrical testing of a semiconductor device uses a probe device including probe tips on a surface of a semiconductor die. The probe tips can be fabricated as metal bumps on contact pads having a pattern that is the same as the pattern of contact pads on the semiconductor device. The semiconductor die can provide the probe device with substantially the same thermal properties as the semiconductor device, so that the same probe can be used for testing over a broad temperature range. Further, the probe device can be fabricated using semiconductor device fabrication techniques, so that probe designs can scale down as device fabrication techniques move to smaller dimensions.