The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Jan. 11, 2007
Tsutomu Ogihara, Niigata-ken, JP;
Fujio Yagihashi, Niigata-ken, JP;
Hideo Nakagawa, Kadoma, JP;
Masaru Sasago, Kadoma, JP;
Tsutomu Ogihara, Niigata-ken, JP;
Fujio Yagihashi, Niigata-ken, JP;
Hideo Nakagawa, Kadoma, JP;
Masaru Sasago, Kadoma, JP;
Shin-Etsu Chemical Co. Ltd., Tokyo, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
The present invention provides a zeolite sol which can be formed into a porous film that can be thinned to an intended thickness by a method used in the ordinary semiconductor process, that excels in dielectric properties, adhesion, film consistency and mechanical strength, and that can be easily thinned; a composition for film formation; a porous film and a method for forming the same; and a high-performing and highly reliable semiconductor device which contains this porous film inside. More specifically, the zeolite sol is prepared by hydrolyzing and decomposing a silane compound expressed by a general formula: Si(OR)(wherein Rrepresents a straight-chain or branched alkyl group having 1 to 4 carbons, and when there is more than one R, the Rs can be independent and the same as or different from each other) in a conventional coating solution for forming a porous film in the presence of a structure-directing agent and a basic catalyst; and then by heating the silane compound at a temperature of 75° C. or lower. A composition for forming a porous film which contains this zeolite sol is used.