The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Mar. 06, 2003
Applicants:
Gerhard Lammel, Tuebingen, DE;
Simon Armbruster, Reutlingen, DE;
Frank Schaefer, Tuebingen, DE;
Hubert Benzel, Pliezhausen, DE;
Inventors:
Gerhard Lammel, Tuebingen, DE;
Simon Armbruster, Reutlingen, DE;
Frank Schaefer, Tuebingen, DE;
Hubert Benzel, Pliezhausen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromechanical component and a method for producing a micromechanical component are proposed, a hollow space and a region of porous silicon being provided, the region of porous silicon being provided for lowering the pressure prevailing in the hollow space.