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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7403023 B1

PDFFull Text
Expired
Date of Patent:
Jul. 22, 2008

Filed:

Mar. 14, 2006

Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered.

Applicants:

Kenneth Steeples, Billerica, MA (US);

Edward Tsidilkovski, Chelmsford, MA (US);

Inventors:

Kenneth Steeples, Billerica, MA (US);

Edward Tsidilkovski, Chelmsford, MA (US);

Assignee:

QC Solutions, Inc., Billerica, MA (US);

Attorney:

Kirkpatrick & Lockhart Preston Gates Ellis LLP

Primary Examiner:

Paresh Patel

Int. Cl.
CPC ...
G01R 31/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to the use of the metrology methods and the related apparatus disclosed herein that incorporate thermal treatment devices and methods that improve defect detection. Specifically, in one aspect the invention relates to method of thermally treating a semiconductor wafer such that an acceleration of interstitial defect migration is achieved while leaving vacancy defects substantially unaltered.

Find Patent Forward Citations

Steeples, Kenneth. (2008). Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered. (U.S. Patent No. 7403023). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7403023

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