The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2008
Filed:
May. 12, 2005
Yasuhide Yoshikawa, Tokyo, JP;
Yoshiyuki Ishikura, Tokyo, JP;
Toru Yamaguchi, Tokyo, JP;
Yamatake Corporation, , JP;
Abstract
In a capacitance type pressure sensor () including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion () formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion () formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion ().