The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2008

Filed:

Feb. 08, 2007
Applicants:

Kenzi Murakami, Hino, JP;

Masahiro Nishio, Akiruno, JP;

Inventors:

Kenzi Murakami, Hino, JP;

Masahiro Nishio, Akiruno, JP;

Assignee:

Olympus Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.


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