The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Sep. 30, 2005
Bruce B. Baxter, San Mateo, CA (US);
Benyamin Buller, Cupertino, CA (US);
Wenwei Qiao, San Jose, CA (US);
Huei-mei Kao, Fremont, CA (US);
Bruce B. Baxter, San Mateo, CA (US);
Benyamin Buller, Cupertino, CA (US);
Wenwei Qiao, San Jose, CA (US);
Huei-Mei Kao, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Improved systems, apparatus, and methods for detecting positions of moving stages and accurately compensating position error during operation (in 'real time') are provided. For some embodiments, rather than rely on two dimensional position measurements, measurements in at least three dimensions may be taken allowing compensation for pitch and roll and, therefore, more accurate position measurements. Further, by including a measurement of a beam column, compensation for movement of the beam may be performed.