The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Apr. 04, 2005
Applicant:
Donald P. Satchell, Jr., Chatham, NJ (US);
Inventor:
Donald P. Satchell, Jr., Chatham, NJ (US);
Assignee:
The BOC Group, Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a process for production, shipment, and treatment of a NHF(HF)feedstock for local production of fluorine and NFfor semiconductor chamber cleaning without the need for storage of large quantities of dangerous feeds and intermediate products.