The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Oct. 24, 2005
Dae Jun Kim, Daejeon, KR;
Jin Woo Jeong, Daegu, KR;
Sang Kuk Choi, Daejeon, KR;
Dae Yong Kim, Daejeon, KR;
Ho Seob Kim, Chungcheongnam-do, KR;
Dae Jun Kim, Daejeon, KR;
Jin Woo Jeong, Daegu, KR;
Sang Kuk Choi, Daejeon, KR;
Dae Yong Kim, Daejeon, KR;
Ho Seob Kim, Chungcheongnam-do, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
A micro column electron beam apparatus having a reduced number of interconnections is provided. The micro column electron beam apparatus includes: a low temperature co-fired ceramic (LTCC) substrate; a plurality of deflector electrodes attached to a predetermined top portion of the LTCC substrate; a pad electrode placed at a top edge of the LTCC substrate and transmitting an external signal to the deflector electrodes; and a connection unit placed in the LTCC substrate and electrically connecting the deflector electrode and the pad electrode.