The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Jul. 15, 2005
Applicants:
Graeme Huntley, Bridgwater, GB;
Kate Wilson, Mountain View, CA (US);
Inventors:
Graeme Huntley, Bridgwater, GB;
Kate Wilson, Mountain View, CA (US);
Assignee:
Edwards Vaccum, Inc., Wilmington, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); F04B 41/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair.
Quick Actions:
Huntley, Graeme. (2008). Arrangement for tool equipment (U.S. Patent No. 7392825). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7392825
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile