The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2008

Filed:

Nov. 26, 2004
Applicants:

Kazuhisa Momose, Kirishima, JP;

Kaoru Matsuo, Kirishima, JP;

Shinichi Shimokihara, Kirishima, JP;

Hisayuki Inoue, Kirishima, JP;

Masashi Kamada, Kirishima, JP;

Hiroshi Tachioka, Kirishima, JP;

Kouichi Maruta, Kirishima, JP;

Hiroshi Oka, Kyoto, JP;

Inventors:

Kazuhisa Momose, Kirishima, JP;

Kaoru Matsuo, Kirishima, JP;

Shinichi Shimokihara, Kirishima, JP;

Hisayuki Inoue, Kirishima, JP;

Masashi Kamada, Kirishima, JP;

Hiroshi Tachioka, Kirishima, JP;

Kouichi Maruta, Kirishima, JP;

Hiroshi Oka, Kyoto, JP;

Assignee:

Kyocera Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sensor substratehaving on its lower surface a surface acoustic wave elementfor detecting pressure is mounted on a supporting substratethrough a sealing membersurrounding a sensor section. A sealing space S is formed by the sensor substrate, the supporting substrate, and the sealing member, and the surface acoustic wave elementfor detecting pressure is sealed hermetically in the sealing space S. Reliability can be enhanced by protecting the surface acoustic wave elementfrom the external environment.


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