The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2008
Filed:
Mar. 02, 2006
Masahiro Ohta, Kyoto, JP;
Masahiro Ohta, Kyoto, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
A scanning probe microscope (SPM) is provided capable of a narrow to a wide range observation according to observed targets or purposes without replacing a scanner while maintaining a high resolution. The SPM is provided with a probe-side scannerand a sample-side scanner. The probe-side scanneris to move the probein X-, Y-, Z-axis directions, and the sample-side scanneris to move the samplein the X-, Y-, Z-axis directions. A scanner with a small maximum scan range is used as the probe-side scanner; a scanner with a large maximum scan range is used as the sample-side scanner; and both can be switched between each scanner for use according to the observed targets or purposes. Alternatively, the probe-side scanneris used for scanning in a narrow range, and the sample-side scanneris used to move the field of view.