The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7390705 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 24, 2008

Filed:

Jul. 25, 2005
Applicant:

Woon Suh Paik, Sangnok-gu, Ansan-si, Gyeonggi-do, KR;

Inventor:

Woon Suh Paik, Sangnok-gu, Ansan-si, Gyeonggi-do, KR;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/20 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for crystallizing an amorphous semiconductor thin film using a non-metal seed epitaxial growth (NSEG) is provided. The method includes the steps of: forming a pair of non-metal seeds for inducing a crystallization of an amorphous semiconductor thin film at a predetermined distance on a transparent insulation substrate; depositing the amorphous semiconductor thin film on the insulation substrate; and heat-treating the insulation substrate to thereby epitaxially grow a poly-crystalline semiconductor thin film from the non-metal seeds, and to thus crystallize the amorphous semiconductor thin film. In the crystallization method, non-metal seeds are used instead of using crystallization induced metal to thereby epitaxially grow the poly-crystalline semiconductor thin film and to thus realize the amorphous semiconductor thin film without having metal pollution.


Find Patent Forward Citations

Paik, Woon. (2008). Method for crystallizing amorphous semiconductor thin film by epitaxial growth using non-metal seed and method for fabricating poly-crystalline thin film transistor using the same (U.S. Patent No. 7390705). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7390705

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