The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Jun. 11, 2003
Natale Speciale, Mazara del Vallo, IT;
Gianluca Valente, Milan, IT;
Danilo Crippa, Novara, IT;
Franco Preti, Milan, IT;
Natale Speciale, Mazara del Vallo, IT;
Gianluca Valente, Milan, IT;
Danilo Crippa, Novara, IT;
Franco Preti, Milan, IT;
E.T.C. Epitaxial Technology Center SRL, Catania, IT;
Abstract
A system for an apparatus of the type adapted to treat substrates and/or wafers is described and comprises a stationary base element and a movable support for at least one substrate or at least one wafer, the support being rotatable above the element about a stationary axis; a chamber, and at least one duct is provided for the admission of at least one gas-flow to the chamber in order to raise the support; the system also comprises means for converting the flow of gas into the chamber into rotation of the support.