The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Mar. 10, 2003
Applicant:
Mark N. Horenstein, West Roxbury, MA (US);
Inventor:
Mark N. Horenstein, West Roxbury, MA (US);
Assignee:
Trustees of Boston University, Boston, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/82 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.