The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Dec. 04, 2006
Applicant:
Naoshi Aikawa, Fujisawa, JP;
Inventor:
Naoshi Aikawa, Fujisawa, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/04 (2006.01); H01J 3/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in Lstages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of N×Lstages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated Ltimes at a magnification that is 1/Ltimes the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number.