The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Oct. 27, 2006
Katsuya Kikuiri, Niigata-ken, JP;
Kiyoshi Sato, Niigata-ken, JP;
Tetsuya Fukuda, Niigata-ken, JP;
Yoshinobu Nakamura, Niigata-ken, JP;
Hiroyuki Kobayashi, Niigata-ken, JP;
Katsuya Kikuiri, Niigata-ken, JP;
Kiyoshi Sato, Niigata-ken, JP;
Tetsuya Fukuda, Niigata-ken, JP;
Yoshinobu Nakamura, Niigata-ken, JP;
Hiroyuki Kobayashi, Niigata-ken, JP;
Alps Electric Co., Ltd, Tokyo, JP;
Abstract
A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a projection passing through the glass substrate to be exposed at the one surface. A second silicon substrate is bonded to the one surface of the glass substrate and is disposed to face the fixed electrode so as to form a cavity between the second silicon substrate and the fixed electrode.