The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Oct. 15, 2003
Applicant:
Othmar Zuger, Triesen, LI;
Inventor:
Othmar Zuger, Triesen, LI;
Assignee:
OC Oerlikon Balzers AG, Balzers, LI;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to the invention, the distribution of material amounts deposited on the substrate may be optimized for magnetron sputter coating in which a magnetron magnetic field pattern () is cyclically (M) moved along the sputtering surface () and a substrate () is passed along the sputter surface (), whereby the sputter rate is modulated by means of a modulation device (), phase-locked with the cyclical movement (M) of the field pattern ().