The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Oct. 25, 2002
Applicants:
Stephen Ivor Hall, Oxford, GB;
Robert Frew Gillespie, Abingdon, GB;
James Timothy Shawcross, Charlbury, GB;
Inventors:
Stephen Ivor Hall, Oxford, GB;
Robert Frew Gillespie, Abingdon, GB;
James Timothy Shawcross, Charlbury, GB;
Assignee:
Qinetiq Limited, , GB;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microwave plasma generator including field-enhancing electrodes consisting of opposed laminae () with a gap () between them orthogonal to the direction of propagation through the plasma generator of microwave radiation. Gas inlet () and outlet () ports are arranged so that a gaseous medium to be excited into the plasma state passes through the gap ().