The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Jul. 16, 2002
Donna K. Johnson, Underhill, VT (US);
Jim S. Nakos, Essex Junction, VT (US);
Jean-jacques H. Psaute, Colchester, VT (US);
Bernard A. Roque, Jr., Williston, VT (US);
Donna K. Johnson, Underhill, VT (US);
Jim S. Nakos, Essex Junction, VT (US);
Jean-Jacques H. Psaute, Colchester, VT (US);
Bernard A. Roque, Jr., Williston, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus for holding a semiconductor substrate comprises a plate having a pocket which holds the substrate, wherein the pocket comprises a lower surface and an inner edge. The inner edge comprises a plurality of members extending radially inward to reduce the area of contact between the inner edge and the substrate. The beveled edge is inclined so that there is an acute angle between the lower surface of the pocket and the beveled edge.