Apparatus for production of crystal of group iii element nitride and process for producing crystal of group iii element nitride

Abstract

A manufacturing apparatus of Group III nitride crystals and a method for manufacturing Group III nitride crystals are provided, by which high quality crystals can be manufactured. For instance, crystals are grown using the apparatus of the present invention as follows. A crystal raw material () and gas containing nitrogen are introduced into a reactor vessel (), to which heat is applied by a heater (), and crystals are grown in an atmosphere of pressure applied thereto. The gas is introduced from a gas supplying device () to the reactor vessel () through a gas inlet of the reactor vessel, and then is exhausted to the inside of a pressure-resistant vessel () through a gas outlet of the reactor vessel. Since the gas is introduced directly to the reactor vessel () without passing through the pressure-resistant vessel (), the mixture of impurities attached to the pressure-resistant vessel () and the like into the site of the crystal growth can be prevented. Further, since the gas flows through the reactor vessel (), there is no aggregation of an evaporating alkali metal, etc., at the gas inlet or the like, and such an alkali metal does not flow into the gas supplying device (). As a result, the quality of Group III nitride crystals obtained can be improved.