The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Apr. 01, 2005
Applicant:
Shrikant Lohokare, Fremont, CA (US);
Inventor:
Shrikant Lohokare, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 1/00 (2006.01); G01K 3/06 (2006.01); G01K 3/14 (2006.01); G01K 11/20 (2006.01); G01K 11/06 (2006.01); G01J 5/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A temperature sensing component enables accurate in situ temperature measurement. The temperature sensing component is disposed within the process chamber. The temperature sensing component has a cavity, in which a transparent cover is disposed over an opening of the cavity. A material is disposed within the cavity of the temperature sensing component, and a sensor is configured to sense a phase change of the material through the transparent cover.