The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Dec. 28, 2005
Kazumasa Takata, Ibaraki, JP;
Hidetoshi Utsuro, Kadoma, JP;
Tomotaka Furuta, Osaka, JP;
Takashi Urashima, Kadoma, JP;
Kazumasa Takata, Ibaraki, JP;
Hidetoshi Utsuro, Kadoma, JP;
Tomotaka Furuta, Osaka, JP;
Takashi Urashima, Kadoma, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beamand a second light beamboth having different phases are generated from light which has passed through an optical component, and are interfered with each other to form an interference region. A linear line, a linear lineand linear linesare set within the interference regionso as to determine a distribution of light intensities on each of the linear lines. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.