The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Nov. 26, 2004
Susan Trolier Mckinstry, State College, PA (US);
Euniki Hong, State College, PA (US);
Carl Baldwin Freidhoff, New Freedom, PA (US);
Silai V Krishnaswamy, Monroeville, PA (US);
Susan Trolier McKinstry, State College, PA (US);
Euniki Hong, State College, PA (US);
Carl Baldwin Freidhoff, New Freedom, PA (US);
Silai V Krishnaswamy, Monroeville, PA (US);
The Penn State Research Foundation, University Park, PA (US);
Northrup Grumman Corp., Los Angeles, CA (US);
Abstract
The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.